application area

This equipment is mainly used for the measurement of plane dimension, height, depth, form and position tolerance of ultra precision electronic components. 3D linear scanning laser sensor is used to scan and measure the flatness. It can calculate the difference of datum plane of complex surface reconstruction, and coordinate with CCD vision positioning. It adopts high resolution camera + annular surface light + coaxial light;

advantage

*It can be equipped with multi brand laser 3D linear scanning sensor and laser confocal sensor to collect the height of special surface;

*The laser 3D scanning acquisition parameters are optimized according to the specific product parameters, self-developed noise filtering algorithm, which has been verified by a variety of products in the industry;

*It is the industry's first, XY two-dimensional interpolation scanning, which can correct the error caused by the non parallel feeding angle and scanning axis;

*The function of sectional compensation in plane area can reduce the influence of axis straightness error;

*High precision moving parts + global calibration compensation, XYZ repeat accuracy 0.005mm

main parameter

1. Detection function: measuring depth, element step, flatness, position, etc

2. Detection efficiency: determined by product surface (3D)

3. Resolution: 2 um

4. Worktable size: 500 x 400 mm, can support double plane customization

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